Page Summary: We have designed tiny actuating systems that pull the mirror and make it rotate about the two axes. Elastic guidance mechanisms are used to guide translational or rotational movements.
Mems Comb Drive Quickfield Simulation Example -
We have designed tiny actuating systems that pull the mirror and make it rotate about the two axes. Elastic guidance mechanisms are used to guide translational or rotational movements.
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- We have designed tiny actuating systems that pull the mirror and make it rotate about the two axes.
- Elastic guidance mechanisms are used to guide translational or rotational movements.
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